Techniques for alternate pressure equalization of a sensor

ABSTRACT

An alternate venting path can be employed in a sensor device for pressure equalization. A sensor component of the device can comprise a diaphragm component and/or backplate component disposed over an acoustic port of the device. The diaphragm component can be formed with no holes to prevent liquid or particles from entering a back cavity of the device, or gap between the diaphragm component and backplate component. A venting port can be formed in the device to create an alternate venting path to the back cavity for pressure equalization for the diaphragm component. A venting component, comprising a filter, membrane, and/or hydrophobic coating, can be associated with the venting port to inhibit liquid and particles from entering the back cavity via the venting port, without degrading performance of the device. The venting component can be designed to achieve a desired low frequency corner of the sensor frequency response.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of, and claims priority to each of,U.S. patent application Ser. No. 16/543,286, filed on Aug. 16, 2019, andentitled “TECHNIQUES FOR ALTERNATE PRESSURE EQUALIZATION OF A SENSOR,”which claims priority to U.S. Provisional Patent Application Ser. No.62/765,083, filed on Aug. 17, 2018, and entitled “Invention DisclosureID-4: Sealed Microphone,” the entireties of which applications arehereby incorporated by reference herein.

TECHNICAL FIELD

The subject disclosure relates generally to sensor technology, e.g.,techniques for alternate pressure equalization of a sensor.

BACKGROUND

Some sensor devices, such as, for example, a microphone and/or acapacitive sensor device, can comprise a diaphragm and a backplate,which can form a sensor component of the device. The sensor device caninclude an acoustic port, which can be a hole formed in a portion of asubstrate of the device, wherein the diaphragm and backplate can beformed or disposed over the acoustic port. Input signals (e.g., acousticsignals or waves) can be received by the device via the acoustic portand can interact with the diaphragm. In response to the input signals,the diaphragm can move or vibrate in relation to the backplate. Thesensor component can generate a sensor signal based at least in part onthe movement or vibration of the diaphragm in relation to the backplate.The sensor signal can be processed by the sensor device (e.g., filteredand/or otherwise processed by circuitry or logic of the sensor device)and/or communicated (e.g., via a wireline or wireless connection) toanother device, system, or component, associated with the sensor device.

The above-described description is merely intended to provide acontextual overview relating to sensor technology, and is not intendedto be exhaustive.

SUMMARY

The following presents a simplified summary of various aspects of thedisclosed subject matter in order to provide a basic understanding ofsome aspects described herein. This summary is not an extensive overviewof the disclosed subject matter. It is intended to neither identify keyor critical elements of the disclosed subject matter nor delineate thescope of such aspects. Its sole purpose is to present some concepts ofthe disclosed subject matter in a simplified form as a prelude to themore detailed description that is presented later.

One or more embodiments, such as one or more devices, systems, methods,integrated circuits, and techniques disclosed herein, relate toemploying an alternate (e.g., secondary) vent path in a sensor tofacilitate providing desirable pressure equalization for the sensorwhile preventing or at least desirably inhibiting liquids or particlesfrom entering a back cavity of the sensor and providing desirableperformance of the sensor. Disclosed herein is a system comprising asensor assembly component comprising a substrate component, wherein anacoustic port is formed in a first portion of the substrate component.The system also comprises a sensor component comprising a diaphragmcomponent disposed over the acoustic port. The system further comprisesa vent component that is associated with a vent port formed in a secondportion of the sensor assembly component other than the diaphragmcomponent, wherein the sensor assembly component comprises a back cavitythat is partially formed and defined by the substrate component, thesensor component, and the vent component, and wherein the vent portprovides a vent path.

Further disclosed herein is a device comprising a substrate component,wherein an acoustic port is formed in a first portion of the substratecomponent. The device also comprises a sensor component comprising adiaphragm component disposed over the acoustic port, and one or morebackplate components disposed over the acoustic port. The device furthercomprises a vent component that is associated with a vent port formed ina second portion of the device other than the diaphragm component andthe backplate component, wherein the device comprises a back cavity thatis partially formed and defined by the substrate component, the sensorcomponent, and the vent component, and wherein the vent port provides aventing path that facilitates an equalization of pressure associatedwith the diaphragm component.

The following description and the annexed drawings set forth in detailcertain illustrative aspects of the disclosed subject matter. Theseaspects are indicative, however, of but a few of the various ways inwhich the principles of the disclosed subject matter may be employed,and the disclosed subject matter is intended to include all such aspectsand their equivalents. Other advantages and distinctive features of thedisclosed subject matter will become apparent from the followingdetailed description of the disclosed subject matter when considered inconjunction with the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional diagram of an example system thatcan employ an alternate (e.g., secondary) venting path in a sensordevice to facilitate providing desirable pressure equalization for thesensor device while preventing or at least desirably inhibiting liquidsor particles from entering a back cavity of the sensor device andproviding desirable performance, including desirable frequency response,of the sensor device, in accordance with various aspects and embodimentsof the disclosed subject matter.

FIG. 2 illustrates a diagram of an example modeling circuit that canmodel various acoustic impedances relating to a sensor device in theform of a circuit comprising circuit components, in accordance withvarious aspects and embodiments of the disclosed subject matter.

FIG. 3 presents a diagram of an example graph of an alternating current(AC) analysis of a frequency response of the sensor device, inaccordance with various aspects and embodiments of the disclosed subjectmatter.

FIG. 4 depicts a cross-sectional diagram of an example system that canemploy an alternate venting path, formed via a vent port with anintegrated vent component, in a sensor device to facilitate providingdesirable pressure equalization for the sensor device while preventingor at least desirably inhibiting liquids or particles from entering aback cavity of the sensor device and providing desirable performance,including desirable frequency response, of the sensor device, inaccordance with various aspects and embodiments of the disclosed subjectmatter.

FIG. 5 illustrates a cross-sectional diagram of an example system thatcan employ an alternate venting path, which can be formed in a lidcomponent, in a sensor device, in accordance with various aspects andembodiments of the disclosed subject matter.

FIG. 6 depicts a cross-sectional diagram of an example system that canemploy an alternate venting path, which can be formed in a circuitcomponent, in a sensor device, in accordance with various aspects andembodiments of the disclosed subject matter.

FIG. 7 illustrates a cross-sectional diagram of an example system thatcan employ an alternate venting path, which can be formed in a handlecomponent, in a sensor device, in accordance with various aspects andembodiments of the disclosed subject matter.

FIG. 8 illustrates a cross-sectional diagram of another example systemthat can form an alternate venting path in, at least in part, a handlecomponent of a sensor device, in a sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter.

FIG. 9 depicts a cross-sectional diagram of an example system that canemploy an alternate venting path, formed via a vent port with anintegrated vent component, in a sensor device, containing no back platecomponent or comprising one or more backplate components, to facilitateproviding desirable pressure equalization for the sensor device whilepreventing or at least desirably inhibiting liquids or particles fromentering a back cavity of the sensor device and providing desirableperformance, including desirable frequency response, of the sensordevice, in accordance with various aspects and embodiments of thedisclosed subject matter.

FIG. 10 illustrates a flow diagram of an example method that can form analternate vent path in a sensor device to facilitate providing desirablepressure equalization for the sensor device while preventing or at leastdesirably inhibiting liquids or particles from entering a back cavity ofthe sensor device and providing desirable performance, includingdesirable frequency response, of the sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter.

FIG. 11 depicts a flow diagram of an example method that can form orimplement a particle-and-liquid resistance component and a ventcomponent that can be associated with an alternate vent path of a sensordevice to facilitate providing desirable pressure equalization for thesensor device while preventing or at least desirably inhibiting liquidsor particles from entering a back cavity of the sensor device andproviding desirable performance, including desirable frequency response,of the sensor device, in accordance with various aspects and embodimentsof the disclosed subject matter.

DETAILED DESCRIPTION

The disclosed subject matter is described with reference to thedrawings, wherein like reference numerals are used to refer to likeelements throughout. In the following description, for purposes ofexplanation, numerous specific details are set forth in order to providea thorough understanding of the various embodiments of the subjectdisclosure. It may be evident, however, that the disclosed subjectmatter may be practiced without these specific details. In otherinstances, well-known structures and devices are shown in block diagramform in order to facilitate describing the various embodiments herein.

Some types of sensors, such as microphones (e.g., aMicroElectroMechanical Systems (MEMS) microphone, electret microphone,condenser microphone, or piezo microphone) or other audio or acousticsensors, can comprise a diaphragm that can vibrate, and facilitategenerating a signal (e.g., sensor signal) in response to input signals(e.g., acoustic sounds or signals) received by the sensor via anacoustic port (e.g., acoustic opening or hole) of the sensor device. Forexample, some sensors can comprise sensor component that can include abackplate in proximity to the diaphragm, wherein the sensor componentcan generate a signal based at least in part on the movement of thediaphragm in relation to the backplate in response to an input signalreceived by the sensor via the acoustic port. Traditionally, a diaphragmcan comprise holes or other small air pathways in the diaphragmstructure to provide suitable pressure equalization that can be desiredby sensors, such as microphones, in order for such sensors to functionproperly.

Liquids and/or particles can enter such traditional sensor devicethrough the acoustic port and into the sensor package via these smallholes or pathways in the diaphragm. Traditionally, to try to preventliquids and/or particles from entering the sensor package, a filter,such as a particle ingress filter (PIF), of some type can be placed overthe acoustic port of the sensor device. The filter may inhibit liquidand relatively large particles (e.g., dust) from entering the sensorpackage via the acoustic port and diaphragm holes or pathways. However,the filter may not prevent liquid and/or relatively fine particles fromentering the sensor package, it can degrade the performance of thesensor device, and it can still be desirable to have a pressureequalization path.

To overcome issues of other systems, methods, and techniques arepresented that can employ an alternate (e.g., secondary) venting path ina sensor device to facilitate providing desirable pressure equalizationfor the sensor device while preventing or at least desirably inhibitingliquids or particles from entering the back cavity of the sensor deviceand providing desirable performance, including desirable frequencyresponse, signal-to-noise ratio (SNR) (e.g., a desirably high SNR), andtotal harmonic distortion (THD) (e.g., a desirably low THD), of thesensor device. The sensor device can comprise a sensor component thatcan include a diaphragm component and/or a backplate component that canbe disposed over an acoustic port of the sensor device.

In some embodiments, the diaphragm component can be formed with no holesto prevent liquid or particles from entering a back cavity of the sensordevice. One or more venting ports can be formed in the sensor package tocreate an alternate (e.g., secondary) venting path(s) to the back cavityto facilitate equalize pressure, or at least substantially equalizepressure, on either side of the diaphragm component. In accordance withvarious embodiments, the one or more venting ports can be formed in atleast one of a substrate component, a lid component, a circuit component(e.g., an application-specific integrated circuit (ASIC)), or a handlecomponent of the sensor device.

The disclosed subject matter also can include a venting component thatcan comprise a filter, membrane, and/or hydrophobic coating that can beassociated with (e.g., disposed over or integrated with) the one or moreventing ports to inhibit liquid and particles from entering the backcavity via the one or more venting ports, without degrading performanceof the sensor device. In certain embodiments, the venting component canbe designed to achieve a desired low frequency corner of the frequencyresponse of the sensor device and/or, as desired, in conjunction withthe known acoustic resistance of the water/particle proofing treatmentof the one or more vent ports (e.g., one or more alternate vent ports).

These and other aspects of the disclosed subject matter are describedwith regard to the figures.

Turning to FIG. 1 , illustrated is a cross-sectional diagram of anexample system 100 that can employ an alternate (e.g., secondary)venting path in a sensor device to facilitate providing desirablepressure equalization for the sensor device while preventing or at leastdesirably inhibiting liquids or particles from entering a back cavity ofthe sensor device and providing desirable performance, includingdesirable frequency response, of the sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Thesystem 100 can be, can comprise, or can be used in connection with anacoustic sensor (e.g., a microphone), a condenser sensor (e.g., acondenser microphone), an electret sensor (e.g., an electret condensermicrophone (ECM)), a capacitive sensor, a capacitive antenna, a piezosensor, and/or other types of sensors, components, or devices. In someimplementations, the system 100 can be, can comprise, or can be used inconnection with a MEMS or semiconductor microphone or other sensor.

The system 100 can be or can comprise a sensor device 102 that can sensesignals or waves (e.g., input signals, such as acoustic waves). Thesensor device 102 can be or can comprise a sensor assembly or sensorpackage that can comprise various components of the sensor device 102,such as described herein. The sensor device 102 can include a substratecomponent 104 (e.g., substrate) that can be formed using one or moredesired materials, such as, for example, a laminate, copper, fiberglass,ceramics (e.g., ceramics with embedded conductors), and/or anotherdesired material (e.g., one or more materials that can be suitable forprinted circuit board (PCB) construction). For instance, the substratecomponent 104 (e.g., laminate) can comprise a PCB with desired circuitcomponents, connections (e.g., conductive connections between circuitcomponents), and/or other circuitry, in accordance with the disclosedsubject matter. As an example, the substrate component 104 can be or cancomprise a structure or stack that can be comprised of the one or morematerials (e.g., one or more layers of materials). The substratecomponent 104 can be formed to be rigid, substantially rigid, orflexible, as desired.

The sensor device 102 also can comprise a sensor component 106 that cansense signals or waves (e.g., input signals, such as acoustic waves)that can impact or interact with the sensor component 106. For example,the sensor component 106 can sense acoustic (e.g., audio) signals orwaves that can be received via an acoustic port 108 that can be formedin a portion of the substrate component 104. The acoustic port 108(e.g., hole or opening) can be formed, for example, by drilling a holein a desired portion of the substrate component 104 or otherwiseremoving the desired portion of the substrate component 104 (e.g., usinga desired material removal process). The sensor component 106 can bedisposed over the acoustic port 108 (e.g., when the sensor device 102 isoriented to have the substrate component 104 be at the bottom of thesensor device 102).

The sensor device 102 also can include a lid component 110 that can beassociated with the substrate component 104. For instance, respectiveends of the lid component 110 can be connected, bonded, adhered, orattached to respective ends of the substrate component 104. The lidcomponent 110 can have desired dimensions (e.g., length, width, height,depth, and thickness). For example, the lid component 110 can be formedto have a length that corresponds to (e.g., spans or substantiallyspans) the length of the substrate component 104. Respective sides ofthe lid component 110 can extend to a desired height from the substratecomponent 104 to facilitate creating a back cavity 112 (e.g., abackvolume) of the sensor device 102 that can be partially defined bythe inner surface of the lid component 110, the substrate component 104(e.g., a top or inner facing surface of the substrate component), andthe sensor component 106 (and can be further defined by other componentsof the sensor device 102 as more fully described herein), and can have adesired size and/or other desired characteristics. The lid component 110can be formed of one or more desired materials, such as a conductivematerial (e.g., conductive metal or other conductive material) and/oranother material. As some non-limiting examples, the lid component 110can be formed of nickel-plated brass, nickel-tin plated stainless steel,a metallized plastic material, and/or another desired material.

With further regard to the sensor component 106, in some embodiments,the sensor component 106 can comprise a diaphragm component 114 and abackplate component 116 that can be formed and/or disposed over theacoustic port 108. In some embodiments, the diaphragm component 114 canbe formed and/or disposed over (e.g., directly over) the acoustic port108 and the backplate component 116 can be formed and/or disposed over,and in proximity to (e.g., within a desired defined distance of), thediaphragm component 114 (and the acoustic port 108) (e.g., as depictedin FIG. 1 ). In certain embodiments, the diaphragm component 114 can beformed to have no holes to facilitate preventing liquids or particlesfrom entering the back cavity 112 if and when liquids or particles enterthe acoustic port 108, as more fully described herein. In accordancewith various other embodiments, a backplate component can be formedand/or disposed directly over the acoustic port and a diaphragmcomponent can be formed and/or disposed over that backplate component,and/or another backplate component can be formed and/or disposed overthat diaphragm component, as more fully described herein and depicted incertain of the other drawings.

To facilitate disposing or forming the diaphragm component 114 andbackplate component 116 over the acoustic port 108, the sensor devicecan comprise respective stack structures or layers that can be formed onthe substrate component 104 in proximity to respective sides or edges ofthe acoustic port 108. The respective stack structures or layers cancomprise a handle component, which, as depicted in the cross-sectionalview of the sensor device 102, can comprise a first portion of thehandle component 118 and a second portion of the handle component 120.It is to be appreciated and understood that the handle component can bea single component, wherein, in the cross-sectional view of the sensordevice 102 in FIG. 1 , the single handle component can be depicted ashaving the first portion of the handle component 118 and the secondportion of the handle component 120; and from a different perspective,such as a top view, the handle component can have a circular,rectangular, octagonal, or other desired shape. The handle component(e.g., 118, 120) can be formed from a desired material, such as aninsulator material (e.g., a silicon-based insulator material). In someembodiments, the handle component (e.g., 118, 120) can be part of theMEMS (e.g., MEMS device of the sensor device 102). For instance, thehandle component (e.g., 118, 120) can be part of the MEMS itself, asopposed to the substrate component 104, wherein the handle component canbe formed during fabrication. In accordance with various embodiments, assome non-limiting examples, the handle component (e.g., 118, 120) cancomprise a silicon material, a polysilicon material, a silicon oninsulator (SOI) material, and/or another desired material(s), such asany material(s) that can be utilized as part of a MEMS process flow.

In certain embodiments, with regard to the sensor device 102, respectiveends of the diaphragm component 114 can be associated with (e.g.,indirectly or directly placed on, adhered to, bonded to, or otherwiseassociated with) the handle component (e.g., the first portion of thehandle component 118 and the second portion of the handle component 120)to place or suspend the diaphragm component 114 over the acoustic port108. It is to be appreciated and understood that, in some embodiments,the stack structures or layers can comprise one or more other components(e.g., layers of material) that can be located in between the handlecomponent (e.g., the first portion of the handle component 118 andsecond portion of the handle component 120) and the diaphragm component114 and/or between the diaphragm component 114 and the backplatecomponent 116. The disclosed subject matter can form, in part, the stackstructures or layers by etching (e.g., using a desired etching process)or otherwise removing material(s) (e.g., using a lithography or drillingprocess) from an initial stack structure or layers to form the stackstructures or layers. That is, for example, with regard to a layer ofmaterial of the initial stack structure, the disclosed subject mattercan remove a portion of the material from that layer, such as theportion of the material disposed over the acoustic port 108, to form thehandle component (e.g., 118, 120) on the stack structures.

The diaphragm component 114 and backplate component 116 can beconfigured to operate as a variable capacitor. To facilitate forming thevariable capacitor of the sensor component 106, the diaphragm component114 can be configured to have a desirable amount of flexibility toenable the diaphragm component 114 to move or vibrate in response to theinput signals or waves received by the system 100 (e.g., received by amicrophone via the acoustic port 108). In some embodiments, thebackplate component 116 can be configured to be a rigid or substantiallyrigid structure that can comprise one or more openings, holes, orperforations that can allow air to move through the backplate component116. As the diaphragm component 114 moves or vibrates in response to theinput signal (e.g., one or more acoustic signals or waves), it also canbe moving in relation to the backplate component 116, which can vary thecapacitance of the variable capacitor, and which can result in sensorcomponent 106 (e.g., the diaphragm component 114 or the backplatecomponent 116) generating a signal (e.g., an electrical signal) that canbe based at least in part on (e.g., can correspond to) the input signal.The capacitance level of the variable capacitor can be in the range of,for example, 1 pF to 2 pF, or another desired range of capacitancelevels.

In accordance with various embodiments, the signal generated by sensorcomponent 106 can be communicated to a circuit component 122 that canfilter and/or otherwise process the signal to generate an output signalthat can be output from the sensor device 102 and/or can generate afeedback signal (e.g., the output signal or other signal generated basedat least in part on the signal) that can be communicated back to thesensor component 106 for use by the sensor component 106 to facilitatedesirably sensing the input signals received by the sensor device 102.The circuit component 122 can comprise desired circuitry (e.g., anintegrated circuit), including circuit components (e.g., resistors,capacitors, transistors, diodes, analog-to-digital converters, and/oramplifiers, . . . ) and respective connections (e.g., electricalconnections) between respective circuit components, to filter and/orotherwise desirably process the signal to generate the output signaland/or the feedback signal. In some embodiments, the circuit component122 can be or can comprise an ASIC. The sensor device 102 can provide(e.g., communicate) the output signal (e.g., digital or analog outputsignal), for example, via a wireline or wireless connection, to anotherdevice, system, or component, associated with the sensor device 102.

As disclosed, traditional sensors can have a traditional diaphragm thatcan have holes (e.g., diaphragm holes) that can provide pressureequalization for a traditional sensor. As a result, if a liquid orparticles enter an acoustic port of such traditional sensor, the liquidor particles can enter the back cavity of such traditional sensor viathe holes of the traditional diaphragm and the holes or perforations inthe backplate, and/or the liquid or particles can become trapped betweenin the gap between the diaphragm and backplate of such traditionalsensor (e.g., the gap between the diaphragm and backplate that can beutilized to facilitate creating the variable capacitance of the sensor).This can damage such traditional sensor and/or can negatively impact theperformance of such sensor.

In accordance with various embodiments, the diaphragm component 114 ofthe sensor device 102 can be formed to have no holes, and, to facilitatecontrolling (e.g., managing) or equalizing the pressure associated witheach side (e.g., back cavity side and acoustic port side) of thediaphragm component 114, the sensor device 102 can comprise one or moreventing ports, including, for example, vent port 124, that can be formedin one or more components of the sensor device 102 (e.g., one or morecomponents of the sensor assembly or sensor package of the sensor device102) other than the diaphragm component 114 (and other than thebackplate component 116), wherein the vent port 124 can be formed tohave desired dimensions (e.g., length, width). In some embodiments, thevent port 124 can be formed in a portion of the substrate component 104to create an opening or path (e.g., a secondary or alternate vent path)between the back cavity 112 and the outside of the sensor device 102 toenable desirable pressure equalization on either side of the diaphragmcomponent 114. For example, the disclosed subject matter can utilize anetching process, lithography process, drilling process, or other desiredprocess to etch away or otherwise remove a portion of the material ofthe substrate component 104 to form the vent port 124. It is to beappreciated and understood that, in accordance with various otherembodiments, additionally or alternatively, one or more other vent portscan be formed in another component(s) (e.g., lid component, circuitcomponent, or handle component) of a sensor device (other than thediaphragm component or backplate component), such as more fullydescribed herein with regard to certain of the other drawings.

In some embodiments, a vent component 126, comprising a set of vents 128(e.g., one or more vents), can be formed and disposed inside the sensordevice 102 over the vent port 124. In certain embodiments, the ventcomponent 126 can be or can comprise a MEMS device. The set of vents 128can allow air to pass through the vent component 126 and vent port 124to facilitate (e.g., to enable) desirable pressure equalization oneither side of the diaphragm component 114. The vent component 126,including the set of vents 128, can be formed of a desired material,such as, for example, an insulator material (e.g., a silicon-basedinsulator material), having desired dimensions (e.g., diameter, length,or width), which can correspond or substantially correspond to the size(e.g., diameter, length, or width) of the vent port 124. In someembodiments, the vent component 126 can comprise a vent handle componentthat can comprise a first portion of the vent handle component 130 and asecond portion of the vent handle component 132 on which respective endsof the set of vents 128 can be placed (e.g., directly or indirectlyplaced) to suspend or dispose the set of vents 128 over the vent port124. The vent handle component (e.g., first portion of the vent handlecomponent 130 and the second portion of the vent handle component 132)can be formed from the same material or a different material (e.g.,different insulator material) than the set of vents 128. The disclosedsubject matter can form (e.g., create) the set of vents 128, the venthandle component (e.g., 130, 132), and/or any other components of thevent component 126 using a desired etching process, lithography process,drilling process, or other process to etch away or otherwise removedesired material(s) from layers of material of the vent stack structure(e.g., stack of materials or layers that can etched or otherwiseprocessed to form the respective components of the vent component 126).

To facilitate waterproofing or dustproofing the sensor device 102, thedisclosed subject matter can employ a particle-and-liquid (PAL)resistance component 134 that can be placed in the vent port 124. It isnoted that the exploded view of the vent port 124 is depicted withoutshowing the PAL resistance component 134 to better illustrate the ventport 124 as it can be structured when formed (e.g., by an etchingprocess, lithography process, drilling process, or other desiredmaterial removal process of the disclosed subject matter) and prior toimplementation of the PAL resistance component 134 with respect to thevent port 124. The PAL resistance component 134 can be or can comprise afilter component and/or a membrane component that can have a desirablyhigh acoustic resistance and/or a desirably small pore size, and/or adesirable liquid-resistant and/or particle resistant coating, such as ahydrophobic coating or superhydrophobic coating, which can be applied tothe filter component and/or the membrane component. In some embodiments,additionally or alternatively, the desirable liquid-resistant and/orparticle-resistant coating (e.g., hydrophobic or superhydrophobiccoating) can be applied to the set of vents 128 of the vent component126. The PAL resistance component 134, employing the filter componentand/or membrane component, and/or the liquid-resistant and/orparticle-resistant coating (e.g., hydrophobic or superhydrophobiccoating) can inhibit (e.g., inhibit to a desirably high degree or level)or prevent, or at least effectively prevent, liquid and particles fromentering the back cavity 112 without degradation to performance of thesensor device 102 (e.g., without reducing SNR or increasing THD of thesensor device 102). In certain embodiments, when a filter component isemployed, the filter component can comprise a filter, such as a particleingress filter (PIF), that can inhibit or prevent, or at leasteffectively prevent, liquid and particles from entering the back cavity112 via the vent port 124. The filter, such as the PIF, associated withthe vent port 124 can have a desired resistance level. For example, ifthe filter (e.g., PIF) is providing the desired vent resistance, or atleast a desired portion of the vent resistance, for the alternate ventpath, the filter can have a relatively high acoustic resistance level.The disclosed subject matter can design and implement the vent port 124,vent component 126, PAL resistance component 134, and/or othercomponents of the sensor device 102 such that the sensor device 102 canbe desirably (e.g., suitably, acceptably, sufficiently, or optimally)liquid resistant and/or particle resistant in accordance with (e.g., tosatisfy, meet, or exceed) one or more desired defined standards relatingto the liquid resistance and/or particle resistance of devices (e.g.,the IP code by the International Electrotechnical Commission (IEC), theNational Electrical Manufacturers Association (NEMA) rating or standard,and/or another desired standard).

The disclosed subject matter can structure and implement the vent port124, vent component 126, including the set of vents 128, PAL resistancecomponent 134, and/or the liquid-resistant and/or particle resistantcoating (and/or another component(s) of the sensor device 102) toachieve a desired acoustic resistance of the sensor device 102 and/or adesired frequency response, including a desired low frequency corner (ora desired gradient response frequency corner) of the frequency response,by the sensor device 102, in accordance with defined frequency responsecriteria. It is to be appreciated and understood that, with regard to anon-directional application of a sensor device (e.g., microphone), thefrequency response can comprise a low frequency corner, and, with regardto a directionality application (e.g., a microphone having a desireddirectionality), the frequency response of the sensor device (e.g.,microphone) can have what is referred to as a gradient responsefrequency corner rather than being referred to as a low frequencycorner. The acoustic resistance and the frequency response, includingthe low frequency corner (or gradient response frequency corner) of thefrequency response, of the sensor device 102, respectively, can be basedat least in part on (e.g., can be affected or influenced by) a varietyof factors, including, for example, the size of the vent port, thenumber of vent ports (e.g., alternate or secondary vent ports)implemented in the sensor device, the location(s) of the vent port(s) onthe sensor device (e.g., location of a vent port relative to thelocation of the diaphragm component and/or acoustic port), the sizeand/or number of vents of the vent component, the type of membranecomponent or filter component of the PAL resistance component, the sizeand/or number of holes in the membrane component (e.g., porousmembrane), whether liquid-resistant and/or particle resistant coating(e.g., hydrophobic or superhydrophobic coating) is applied to the ventsor the membrane component, whether the vent features of the sensordevice 102 (e.g., vent component, vent port, and/or other associatedcomponents) are implemented using a MEMS device, and/or other physical,mechanical, and/or electronic features or mechanisms of the sensordevice. With further regard to the frequency response, including the lowfrequency corner of the frequency response, of the sensor device 102, insome embodiments, as desired, the disclosed subject matter can designand implement the alternate vent path, including the vent port 124, ventcomponent 126, and/or PAL resistance component 134, and/or othercomponents of the sensor device 102 to have a same or similar frequencyresponse, including a same or similar low frequency corner of thefrequency response, of the sensor device 102 as traditional sensordevices (e.g. traditional microphones) that have diaphragms with holesin them for venting and to achieve pressure equalization, in accordancewith applicable frequency response criteria (e.g., when the definedfrequency response criteria specifies such a frequency response isdesired).

In certain embodiments, if the vent features (e.g., alternate vent path,including the vent component, vent port, PAL resistance component,and/or other vent feature component) of a sensor device are notimplemented using MEMS, the disclosed subject matter can achieve adesired resistance (e.g., acoustic or vent resistance) for the sensordevice with a hole of a desired size (e.g., 0.11 millimeters (mm) oranother desired size) formed in the substrate component (e.g., laminate)or lid component with a desired mesh, such as, for example, a SAATIAcoustex polyester (PES) 7/2 mesh, which can have a specific acousticresistance of 1800 meter-kilogram-second (MKS) Rayles.

Referring briefly to FIGS. 2 and 3 (along with FIG. 1 ), FIG. 2illustrates a diagram of an example acoustic lumped element modelingcircuit 200 comprised of various resistances, compliances, and masses,which can relate to (e.g., can represent) a sensor device, in the formof a circuit comprising circuit components, to illustrate and/or predictsensor (e.g., microphone) performance, in accordance with variousaspects and embodiments of the disclosed subject matter. The modelingcircuit 200 can be employed to model the frequency response, includingthe low frequency corner of the frequency response, of a sensor devicethat includes venting and the associated venting resistance. The lowfrequency corner of the frequency response of the sensor device can becontrolled primarily by vent resistance associated with the vent (e.g.,vent port and vent component) and backvolume (e.g., back cavity) of thesensor device. FIG. 3 presents a diagram of an example graph 300 of analternating current (AC) analysis of a frequency response of the sensordevice, in accordance with various aspects and embodiments of thedisclosed subject matter.

With further regard to FIG. 2 , the modeling circuit 200 can comprise aninductor 202 that can have an inductance level that can correspond toand represent an inductance level associated with an acoustic port(e.g., acoustic port 108) of a sensor device (e.g., sensor device 102).The modeling circuit 200 also can include a resistor 204 that can have aresistance level that can correspond to and represent a resistance levelassociated with a vent (e.g., vent port 124 and vent component 126) ofthe sensor device. In parallel with the resistor 204, the modelingcircuit 200 further can comprise a resistor 206, an inductor 208, and acapacitor 210, in series with each other, wherein the resistor 206 cancorrespond to and represent a resistance level associated with abackplate (e.g., backplate component 116) of the sensor device, theinductor 208 can have an inductance level that can correspond to andrepresent an acoustic mass level associated with a diaphragm (e.g.,diaphragm component 114) of the sensor device, and the capacitor 210 canhave a capacitance level that can correspond to and represent acompliance level associated with the diaphragm. The resistor 204 and theresistor 206 can be associated with (e.g., connected to) the inductor202 at a node of the modeling circuit 200. The resistor 204 and thecapacitor 210 can be associated with (e.g., connected to) capacitor 212that can have a capacitance level that can correspond to and represent acompliance level associated with a back cavity (e.g., back cavity 112)of the sensor device, wherein the capacitor 212 can be associated with aground 214 that can be at ground level. The inductor 202 can have aninductance level that can correspond to and represent the acoustic massassociated with the acoustic port (e.g. acoustic port 108). The inductor202 can be associated with (e.g., connected to) and driven by a voltagesource 216, wherein the source 216 can represent the input soundpressure to the acoustic port (e.g., sound port) and reference voltagefor the associated circuit analysis and simulation of the acousticlumped element model represented by the acoustic lumped element modelingcircuit 200.

In some embodiments, the disclosed subject matter can determine the lowfrequency corner (or gradient response frequency corner) of thefrequency response of the sensor device (e.g., sensor device 102) basedat least in part on (e.g., as a function of) the equation 1/2πRC,wherein R can be the resistance (e.g., acoustic resistance) of the ventfeatures of the sensor device (e.g., vent port, vent component,including the set of vents, the PAL resistance component, and/or otherfeatures associated with the vent port or vent component) and C can bethe compliance level of or associated with the back cavity (e.g.,backvolume) of the sensor device.

With further regard to FIG. 3 , the example graph 300 illustrates an ACanalysis of the frequency response 302 of the sensor device, includingrespective magnitudes of the response at respective frequencies, inHertz (Hz). As disclosed, the low frequency corner 304 of the frequencyresponse 302 can be controlled primarily by a vent resistance that canbe associated with the vent (e.g., vent port 124 and vent component 126,including the filter component, membrane component, and/or hydrophobiccoating associated with the vent port 124 or vent component 126) and thebackvolume (e.g., back cavity 112) of the sensor device (e.g., sensordevice 102).

With further regard to the system 100 of FIG. 1 , as desired, in someembodiments, the disclosed subject matter can purposely arrange orstructure the components of the sensor device 102, including, forexample, the diaphragm component 114 and the vent port 124, to achievedesired directionality of the sensor device 102 (e.g., directionality ofthe microphone). For instance, the vent port 124 can be placed a desireddistance away (e.g., a further distance away) from the diaphragmcomponent 114 in the sensor package of the sensor device 102, and/or canemploy other mechanical or electronic features or mechanisms in thesensor device 102, to introduce or create a desired acoustic delay inthe sensor device 102 to create a desired directionality in the sensordevice 102 (e.g., to create a directional microphone having a desireddirectionality (e.g., a desired directional sensing or pickup pattern)),in addition to the sensor device 102 providing the desired alternate(e.g., secondary) vent path, via the vent port 124, desired frequencyresponse, including a desired pressure gradient response (as the resultof the difference of sound pressure magnitude and phase between theacoustic port 108 and vent port 124), and desired venting and pressureequalization features and the desired particle and liquid resistantfeatures of the sensor device 102. The sensing or pickup pattern of thesensor device 102 (e.g., microphone with desired directionality) can bedetermined based at least in part on the resistance value (e.g., thevalue of the acoustic resistance) of the sensor device 102. As onenon-limiting example, a vent port can be formed in a location of the lidcomponent of the sensor device that is relatively further away from thediaphragm component than the vent port in the substrate component isfrom the diaphragm component and/or can employ a housing around thesensor component (e.g., housing located in between the diaphragmcomponent and the vent port in the lid component) to increase the frontbetween the vent port and the diaphragm component to introduce or createa desired acoustic delay in the sensor device and thereby create adesired directional pattern (e.g., directional sensor or pickup pattern)of the sensor device. The value of the acoustic resistance of thealternate vent port 124 can have a desired impact on determining thedirectional pickup pattern (e.g., cardioid versus figure-eight, etc.).

In accordance with various embodiments, the gradient response frequencycorner of the sensor device 102 can be based at least in part on thedistance between the alternate vent path (e.g., the vent port 124) andthe diaphragm component 114 (as well as other factors). For instance,the further the distance between the alternate vent path and thediaphragm component 114, the lower the gradient response frequencycorner of the sensor device 102 can be, and conversely, the shorter thedistance between the alternate vent path and the diaphragm component114, the higher the gradient response frequency corner of the sensordevice 102 can be. As a non-limiting example, with regard to the lowfrequency corner, instead of designing a sensor device (e.g., selectingcomponents of the sensor device, determining and implementing analternate vent path in a desired location relative to the diaphragmcomponent, determining and implementing a vent component and PALresistance component, and/or determining and implementing other featuresof the sensor device) to have a relatively lower low frequency corner,e.g., as depicted by the example low frequency corner 304 in the examplefrequency response 302 of the example graph 300 of FIG. 3 , as desired,to create a desired directional sensor device (e.g., directionalmicrophone), the disclosed subject matter can be employed to design andimplement a desired distance (e.g., relatively longer distance) betweenthe alternate vent path (e.g., vent port) and the diaphragm component,design and implement a desired amount of resistance (e.g., acousticresistance) for the sensor device, and/or design and implement anobstruction (e.g., physical, mechanical, or electronic feature ormechanism) between the alternate vent path and the diaphragm componentor acoustic port of the sensor device, to thereby correspondinglyintroduce, create, produce, or achieve a pressure gradient response inthe range of, for example, one, two, or several kilohertz (kHz), oranother desired frequency or frequency range, because a directionalsensor (e.g., directional microphone) can have a falling response (e.g.,a gradient response), which can decrease a certain number of decibels(dBs) per octave (e.g., 5, 5.5, 6, or other number of dBs per octave).

FIG. 4 depicts a cross-sectional diagram of an example system 400 thatcan employ an alternate (e.g., secondary) venting path, formed via avent port with an integrated vent component, in a sensor device tofacilitate providing desirable pressure equalization for the sensordevice while preventing or at least desirably inhibiting liquids orparticles from entering a back cavity of the sensor device and providingdesirable performance, including desirable frequency response, of thesensor device, in accordance with various aspects and embodiments of thedisclosed subject matter. The system 400 can be substantially the sameas the system 100 of FIG. 1 , except that the system 400 can have a ventcomponent, comprising a set of vents, that can be integrated with a ventport formed in the substrate component of the sensor device.

The system 400 can comprise a sensor device 402 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 402, such as described herein. Thesensor device 402 can comprise a substrate component 404 (e.g.,substrate), a sensor component 406, an acoustic port 408, a lidcomponent 410, and a back cavity 412, wherein the sensor component 406can comprise a diaphragm component 414 and a backplate component 416.The sensor device 402 also can include a handle component, comprising afirst portion of the handle component 418 and a second portion of thehandle component 420 (e.g., a single handle component with first andsecond portions of the handle component being depicted in thecross-sectional view of the sensor device 402 in FIG. 4 ). The sensordevice 402 further can include a circuit component 422 and a vent port424. These respective components of the system 400 can be the same as orsimilar to, and/or can comprise the same or similar features orfunctionalities as, respective components (e.g., respectively namedcomponents), such as more fully disclosed herein. These respectivecomponents of the system 400 can be arranged in relation to each otheras depicted in FIG. 4 and as more fully described herein (e.g., withregard to system 100 of FIG. 1 ).

In some embodiments, the sensor device 402 can comprise a vent component426, comprising a set of vents 428, that can be integrated with the ventport 424 formed in the substrate component 404, rather than disposedover the vent port, as depicted in the sensor device 102 of FIG. 1 ,although the vent port 424, vent component 426, and the set of vents 428can function the same or essentially the same as the vent port 124, ventcomponent 126, and set of vents 128, respectively, of the sensor device102 of FIG. 1 . For example, the vent component 426 can be formed in thesubstrate component 404 using a desired etching, drilling, or material(e.g., substrate material) removal process to create one or more holesor vents having desired dimensions.

The sensor device 402 also can comprise a PAL resistance component 430that can be placed in or integrated with the vent port 424. It is notedthat the exploded view of the vent port 424 is depicted without showingthe PAL resistance component 430 to better illustrate the vent port 424as it can be structured when formed (e.g., by an etching process orother desired material removal process of the disclosed subject matter)and prior to implementation of the PAL resistance component 430 withrespect to the vent port 424. The PAL resistance component 430 can be orcan comprise a filter component and/or a membrane component that canhave a desirably high acoustic resistance and/or a desirably small poresize, and/or a desirable liquid-resistant and/or particle resistantcoating, such as a hydrophobic coating or superhydrophobic coating,which can be applied to the filter component and/or the membranecomponent. In some embodiments, additionally or alternatively, thedesirable liquid-resistant and/or particle resistant coating (e.g.,hydrophobic or superhydrophobic coating) can be applied to the set ofvents 428 of the vent component 426. The PAL resistance component 430can be the same as or substantially the same as the PAL resistancecomponent 134 of sensor device 102 of FIG. 1 . The PAL resistancecomponent 430, utilizing the filter component and/or membrane component,and/or the liquid-resistant and/or particle resistant coating (e.g.,hydrophobic or superhydrophobic coating) can inhibit or prevent, or atleast effectively prevent, liquid and particles from entering the backcavity 412 without degradation to performance of the sensor device 402(e.g., without reducing SNR or increasing THD of the sensor device 402).

The sensor device 402, employing the vent port 424, which can providealternate or secondary vent path, the vent component 426, and PALresistance component 430, can be configured or designed to achieve adesired frequency response, including a desired low frequency corner ofthe frequency response, of the sensor device 402. In some embodiments,the sensor device 402, employing the vent port 424, the vent component426, and PAL resistance component 430, can be configured or designed toachieve the desired frequency response, including the desired lowfrequency corner of the frequency response, in conjunction with theknown acoustic resistance of the PAL resistance component 430 (e.g., theacoustic resistance of the filter component, membrane component, and/orhydrophobic coating).

FIG. 5 illustrates a cross-sectional diagram of an example system 500that can employ an alternate (e.g., secondary) venting path, which canbe formed in a lid component, in a sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Thesystem 500, by employing the alternate venting path formed in the lidcomponent, can facilitate providing desirable pressure equalization forthe sensor device while preventing or at least desirably inhibitingliquids or particles from entering a back cavity of the sensor deviceand providing desirable performance, including desirable frequencyresponse, of the sensor device, in accordance with various aspects andembodiments of the disclosed subject matter. The system 500 can besubstantially the same as the system 100 of FIG. 1 , except that thesystem 500 can have a vent port formed in a lid component of the sensordevice to form an alternate venting path in the sensor device.

The system 500 can comprise a sensor device 502 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 502, such as described herein. Thesensor device 502 can comprise a substrate component 504, a sensorcomponent 506, an acoustic port 508, a lid component 510, and a backcavity 512, wherein the sensor component 506 can comprise a diaphragmcomponent 514 and a backplate component 516. The sensor device 502 alsocan comprise a handle component, including a first portion of the handlecomponent 518 and a second portion of the handle component 520. Thesensor device 502 further can include a circuit component 522. Theserespective components of the system 500 can be the same as or similarto, and/or can comprise the same or similar features or functionalitiesas, respective components (e.g., respectively named components), such asmore fully disclosed herein. These respective components of the system500 can be arranged in relation to each other as depicted in FIG. 5 andas more fully described herein (e.g., with regard to system 100 of FIG.1 ).

In some embodiments, the sensor device 502 can include a vent port 524that can be formed in a desired portion of the lid component 510. Forexample, the disclosed subject matter can utilize an etching process,lithography process, drilling process, or other desired process to etchaway or otherwise remove a portion of the material of the lid component510 to form the vent port 524. In FIG. 5 , the vent port 524 is depictedas being located in a portion of a side (e.g., left side) of the lidcomponent 510. It is to be appreciated and understood though that, inaccordance with various embodiments of the disclosed subject matter,alternatively or additionally, a vent port (e.g., vent port 524) can beformed in a portion of the top side of the lid component 510 or aportion of another side (e.g., right side) of the lid component 510. Thedisclosed subject matter can form the vent port 524 to have desireddimensions (e.g., length, width). The vent port 524 can be formed in theportion of the lid component 510 to create an opening or path (e.g., asecondary or alternate vent path) between the back cavity 512 and theoutside of the sensor device 502 to enable desirable equalization orcontrol of pressure (e.g., pressure equalization) on either side of thediaphragm component 514.

The sensor device 502 also can comprise a vent component 526, which caninclude a set of vents 528. The vent component 526 can be associatedwith the vent port 524. For instance, the set of vents 528 can bedisposed over the vent port 524. In some embodiments, the vent component526 can comprise a vent handle component that can include a firstportion of the vent handle component 530 and a second portion of thevent handle component 532 on which respective ends of the set of vents528 can be placed (e.g., directly or indirectly placed) to suspend ordispose the set of vents 528 over the vent port 524, wherein the venthandle component (e.g., 530, 532) can be formed (e.g., directly orindirectly formed) on an inner surface of the lid component 510 inproximity to the vent port 524. The vent handle component (e.g., 530,532) can be formed from the same material or a different material (e.g.,different insulator material) than the set of vents 528. The disclosedsubject matter can form (e.g., create) the set of vents 528, the venthandle component (e.g., 530, 532), and/or any other components of thevent component 526 using a desired etching process, lithography process,drilling process, or other process to etch away or otherwise removedesired material(s) from layers of material of the vent stack structure(e.g., stack of materials or layers that can etched or otherwiseprocessed to form the respective components of the vent component 526).The vent port 524, vent component 526, and the set of vents 528 canfunction the same or essentially the same as the vent port 124, ventcomponent 126, and set of vents 128, respectively, of the sensor device102 of FIG. 1 .

In certain embodiments, the vent component 526 can be integrated withthe vent port 524, wherein, for example, the disclosed subject mattercan form the vent component 526 (e.g., the set of vents 528 of the ventcomponent 526) in the lid component 510 using a desired etching,lithography, drilling, or material removal process to create one or moreholes or vents (e.g., having desired dimensions) in the lid component510 or by employing a lid component 510 comprising a desired porousmaterial (e.g., porous metal and/or conductive material) that can havepores of a desirable size that can be implemented as vents (wherein, insuch embodiments, the vent component 526 would not have to have the venthandle components (e.g., 530, 532)).

The sensor device 502 also can comprise a PAL resistance component 534that can be placed in or integrated with the vent port 524. It is notedthat the exploded view of the vent port 524 is depicted without showingthe PAL resistance component 534 to better illustrate the vent port 524as it can be structured when formed (e.g., by an etching process,lithography process, or other desired material removal process of thedisclosed subject matter) and prior to implementation of the PALresistance component 534 with respect to the vent port 524. The PALresistance component 534 can be or can comprise a filter componentand/or a membrane component that can have a desirably high acousticresistance and/or a desirably small pore size, and/or a desirableliquid-resistant and/or particle resistant coating (e.g., hydrophobiccoating or superhydrophobic coating), which can be applied to the filtercomponent and/or the membrane component. In some embodiments,additionally or alternatively, the desirable liquid-resistant and/orparticle resistant coating can be applied to the set of vents 528 of thevent component 526. The PAL resistance component 534 can be the same asor substantially the same as the PAL resistance component 134 of sensordevice 102 of FIG. 1 . The PAL resistance component 534, utilizing thefilter component and/or membrane component, and/or the liquid-resistantand/or particle resistant coating can inhibit or prevent, or at leasteffectively prevent, liquid and particles from entering the back cavity512 without degradation to performance of the sensor device 502 (e.g.,without reducing SNR or increasing THD of the sensor device 502).

The sensor device 502, employing the vent port 524, the vent component526, and the PAL resistance component 534, can be configured or designedto achieve a desired frequency response, including a desired lowfrequency corner of the frequency response, of the sensor device 502. Insome embodiments, the sensor device 502, employing the vent port 524,the vent component 526, and the PAL resistance component 534, can beconfigured or designed to achieve the desired frequency response,including the desired low frequency corner of the frequency response, inconjunction with the known acoustic resistance of the PAL resistancecomponent 534 (e.g., the acoustic resistance of the filter component,membrane component, and/or hydrophobic coating).

FIG. 6 depicts a cross-sectional diagram of an example system 600 thatcan employ an alternate (e.g., secondary) venting path, which can beformed in a circuit component, in a sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Thesystem 600, by employing the alternate venting path formed in thecircuit component (e.g., ASIC), can facilitate providing desirablepressure equalization for the sensor device while preventing or at leastdesirably inhibiting liquids or particles from entering a back cavity ofthe sensor device and providing desirable performance, includingdesirable frequency response, of the sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Thesystem 600 can be substantially the same as the system 100 of FIG. 1 ,except that the system 600 can have a vent port formed in a circuitcomponent (e.g., ASIC) and substrate component of the sensor device toform an alternate venting path in the sensor device.

The system 600 can comprise a sensor device 602 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 602, such as more fully describedherein. The sensor device 602 can comprise a substrate component 604, asensor component 606, an acoustic port 608, a lid component 610, and aback cavity 612, wherein the sensor component 606 can comprise adiaphragm component 614 and a backplate component 616. The sensor device602 also can comprise a handle component, which can include a firstportion of the handle component 618 and a second portion of the handlecomponent 620. The sensor device 602 further can comprise a circuitcomponent 622. These respective components of the system 600 can be thesame as or similar to, and/or can comprise the same or similar featuresor functionalities as, respective components (e.g., respectively namedcomponents), such as more fully disclosed herein. These respectivecomponents of the system 600 can be arranged in relation to each otheras illustrated in FIG. 6 and as more fully described herein (e.g., withregard to system 100 of FIG. 1 ).

In some embodiments, the sensor device 602 can include a vent port 624that can be formed in a desired portion of the circuit component 622 andsubstrate component 604. For example, the disclosed subject matter canutilize an etching process, lithography process, drilling process, orother desired process to etch away or otherwise remove a portion of thematerial of the circuit component 622 and a portion of the material ofthe substrate component 604 to form the vent port 624. The disclosedsubject matter can form the vent port 624 to have desired dimensions(e.g., length, width). The vent port 624 can be formed in the respectiveportions of the circuit component 622 and the material of the substratecomponent 604 to create an opening or path (e.g., a secondary oralternate vent path) between the back cavity 612 and the outside of thesensor device 602 to enable desirable equalization or control ofpressure (e.g., pressure equalization) on either side of the diaphragmcomponent 614.

The sensor device 602 also can comprise a vent component 626, which caninclude a set of vents 628. The vent component 626 can be associatedwith the vent port 624. For example, the set of vents 628 can bedisposed over the vent port 624. In some embodiments, the vent component626 can comprise a vent handle component that can include a firstportion of the vent handle component 630 and a second portion of thevent handle component 632 on which respective ends of the set of vents628 can be placed (e.g., directly or indirectly placed) to suspend ordispose the set of vents 628 over the vent port 624, wherein the venthandle component (e.g., 630, 632) can be formed (e.g., directly orindirectly formed) on a top surface of the circuit component 622 inproximity to the vent port 624. The vent handle component (e.g., 630,632) can be formed from the same material or a different material (e.g.,different insulator material) than the set of vents 628. The disclosedsubject matter can form (e.g., create) the set of vents 628, the venthandle component (e.g., 630, 632), and/or any other components of thevent component 626 using a desired etching process, lithography process,drilling process, or other process to etch away or otherwise removedesired material(s) from layers of material of the vent stack structure(e.g., stack of materials or layers that can etched or otherwiseprocessed to form the respective components of the vent component 626).The vent port 624, vent component 626, and the set of vents 628 of thesensor device 602 of FIG. 6 can function the same or essentially thesame as the vent port 124, vent component 126, and set of vents 128,respectively, of the sensor device 102 of FIG. 1 .

The sensor device 602 further can include a PAL resistance component 634that can be placed in or integrated with the vent port 624. It is notedthat the exploded view of the vent port 624 is depicted without showingthe PAL resistance component 634 to better illustrate the vent port 624as it can be structured when formed (e.g., by an etching process,lithography process, drilling process, or other desired material removalprocess of the disclosed subject matter) and prior to implementation ofthe PAL resistance component 634 with respect to the vent port 624. ThePAL resistance component 634 can be or can comprise a filter componentand/or a membrane component that can have a desirably high acousticresistance and/or a desirably small pore size, and/or a desirableliquid-resistant and/or particle resistant coating (e.g., hydrophobiccoating or superhydrophobic coating), which can be applied to the filtercomponent and/or the membrane component. In some embodiments,additionally or alternatively, the desirable liquid-resistant and/orparticle resistant coating can be applied to the set of vents 628 of thevent component 626. The PAL resistance component 634 of the sensordevice 602 of FIG. 6 can be the same as or substantially the same as thePAL resistance component 134 of the sensor device 102 of FIG. 1 . ThePAL resistance component 634, utilizing the filter component and/ormembrane component, and/or the liquid-resistant and/or particleresistant coating can inhibit or prevent, or at least effectivelyprevent, liquid and particles from entering the back cavity 612 withoutdegradation to performance of the sensor device 602 (e.g., withoutreducing SNR or increasing THD of the sensor device 602).

The sensor device 602, employing the vent port 624, the vent component626, and the PAL resistance component 634, can be configured or designedto achieve a desired frequency response, including a desired lowfrequency corner of the frequency response, of the sensor device 602. Insome embodiments, the sensor device 602, employing the vent port 624,the vent component 626, and the PAL resistance component 634, can beconfigured or designed to achieve the desired frequency response,including the desired low frequency corner of the frequency response, inconjunction with the known acoustic resistance of the PAL resistancecomponent 634 (e.g., the acoustic resistance of the filter component,membrane component, and/or hydrophobic coating).

FIG. 7 illustrates a cross-sectional diagram of an example system 700that can employ an alternate (e.g., secondary) venting path, which canbe formed in a handle component, in a sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Thesystem 700, by employing the alternate venting path formed in the handlecomponent, can facilitate providing desirable pressure equalization forthe sensor device while preventing or at least desirably inhibitingliquids or particles from entering a back cavity of the sensor deviceand providing desirable performance, including desirable frequencyresponse, of the sensor device, in accordance with various aspects andembodiments of the disclosed subject matter. The system 700 can besubstantially the same as the system 100 of FIG. 1 , except that thesystem 700 can have a vent port formed in a handle component of thesensor device to form an alternate venting path in the sensor device.

The system 700 can comprise a sensor device 702 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 702, such as more fully describedherein. The sensor device 702 can comprise a substrate component 704, asensor component 706, an acoustic port 708, a lid component 710, and aback cavity 712, wherein the sensor component 706 can comprise adiaphragm component 714 and a backplate component 716. The sensor device702 also can comprise a handle component, which can include a firstportion of the handle component 718 and a second portion of the handlecomponent 720. The sensor device 702 further can comprise a circuitcomponent 722. These respective components of the system 700 can be thesame as or similar to, and/or can comprise the same or similar featuresor functionalities as, respective components (e.g., respectively namedcomponents), such as more fully disclosed herein. These respectivecomponents of the system 700 can be arranged in relation to each otheras illustrated in FIG. 7 and as more fully described herein (e.g., withregard to system 100 of FIG. 1 ).

In some embodiments, the sensor device 702 can include a vent port 724 aand/or vent port 724 b that can be formed in a desired portion of thefirst portion of the handle component 718 and/or a desired portion ofthe second portion of the handle component 720. For example, thedisclosed subject matter can utilize an etching process, lithographyprocess, drilling process, or other desired process to etch away orotherwise remove a portion of the material of the first portion of thehandle component 718 to form the vent port 724 a and/or a portion of thematerial of the second portion of the handle component 720 to form thevent port 724 b. The disclosed subject matter can form the vent port 724a and/or vent port 724 b to have desired dimensions (e.g., length,width). The vent port 724 a and/or vent port 724 b can be formed in therespective portion(s) of the first portion of the handle component 718and/or the second portion of the handle component 720 to create anopening(s) or path(s) (e.g., a secondary or alternate vent path(s))between the back cavity 712 and the outside of the sensor device 702 toenable desirable equalization or control of pressure (e.g., pressureequalization) on either side of the diaphragm component 714.

The sensor device 702 also can comprise a vent component 726 a, whichcan include a set of vents 728 a, and/or vent component 726 b, which caninclude a set of vents 728 b. The vent component 726 a can be associatedwith the vent port 724 a and/or the vent component 726 b can beassociated with the vent port 724 b. For example, the set of vents 728 acan be disposed over the vent port 724 a, and/or the set of vents 728 bcan be disposed over the vent port 724 a. In some embodiments, the ventcomponent 726 a can comprise a vent handle component that can include afirst portion of the vent handle component 730 a and a second portion ofthe vent handle component 732 a on which respective ends of the set ofvents 728 a can be placed (e.g., directly or indirectly placed) tosuspend or dispose the set of vents 728 a over the vent port 724 a,wherein the vent handle component (e.g., 730 a, 732 a) can be formed(e.g., directly or indirectly formed) on a surface of the first portionof the handle component 718 in proximity to the vent port 724 a.Alternatively or additionally, the vent component 726 b can comprise avent handle component that can include a first portion of the venthandle component 730 b and a second portion of the vent handle component732 b on which respective ends of the set of vents 728 b can be placed(e.g., directly or indirectly placed) to suspend or dispose the set ofvents 728 b over the vent port 724 b, wherein such vent handle component(e.g., 730 b, 732 b) can be formed (e.g., directly or indirectly formed)on a surface of the second portion of the handle component 720 inproximity to the vent port 724 b. The vent handle component (e.g., 730a, 732 a) associated with the vent component 726 a and/or the venthandle component (e.g., 730 b, 732 b) associated with the vent component726 b can be formed from the same material or a different material(e.g., different insulator material) than the set of vents 728 a and/orset of vents 728 b. The disclosed subject matter can form (e.g., create)the set of vents 728 a and/or set of vents 728 b, the vent handlecomponent (e.g., 730 a, 732 a) and/or the other vent handle component(e.g., 730 b, 732 b), and/or any other components of the vent component726 a and/or vent component 726 b using a desired etching process,lithography process, drilling process, or other process to etch away orotherwise remove desired material(s) from layers of material of therespective vent stack structure(s) (e.g., stack of materials or layersthat can etched or otherwise processed to form the respective componentsof the vent component 726 a and/or the respective components of the ventcomponent 726 b). While the disclosed subject matter depicts the ventcomponent 726 a and vent component 726 b as being located inside thesensor package on the back cavity side of the sensor device 702, inother embodiments, the disclosed subject matter can form the ventcomponent 726 a and/or vent component 726 b on the acoustic port side ofthe sensor device 702, wherein the vent component 726 a and/or ventcomponent 726 b can thereby be associated or integrated with theacoustic port 708. The vent port 724 a and/or vent port 724 b, ventcomponent 726 a and/or vent component 726 b, and the set of vents 728 aand/or set of vents 728 b of the sensor device 702 of FIG. 7 canfunction the same or essentially the same as the vent port 124, ventcomponent 126, and set of vents 128, respectively, of the sensor device102 of FIG. 1 .

The sensor device 702 further can include a PAL resistance component 734a that can be placed in or integrated with the vent port 724 a, and/orPAL resistance component 734 b that can be placed in or integrated withthe vent port 724 b. It is noted that the exploded view of the vent port724 a is depicted without showing the PAL resistance component 734 a tobetter illustrate the vent port 724 a as it can be structured whenformed (e.g., by an etching process, lithography process, drillingprocess, or other desired material removal process of the disclosedsubject matter) and prior to implementation of the PAL resistancecomponent 734 a with respect to the vent port 724 a. Each of the PALresistance component 734 a and/or PAL resistance component 734 b can beor can comprise a filter component and/or a membrane component that canhave a desirably high acoustic resistance and/or a desirably small poresize, and/or a desirable liquid-resistant and/or particle resistantcoating (e.g., hydrophobic coating or superhydrophobic coating), whichcan be applied to the filter component and/or the membrane component. Insome embodiments, additionally or alternatively, the desirableliquid-resistant and/or particle resistant coating can be applied to theset of vents 728 a of the vent component 726 a and/or the set of vents728 b of the vent component 726 b. The PAL resistance component 734 aand/or PAL resistance component 734 b of the sensor device 702 of FIG. 7can be the same as or substantially the same as the PAL resistancecomponent 134 of the sensor device 102 of FIG. 1 . Each of the PALresistance component 734 a and/or the PAL resistance component 734 b,utilizing the filter component and/or membrane component, and/or theliquid-resistant and/or particle resistant coating can inhibit orprevent, or at least effectively prevent, liquid and particles fromentering the back cavity 712 without degradation to performance of thesensor device 702 (e.g., without reducing SNR or increasing THD of thesensor device 702).

The sensor device 702, employing the vent port 724 a and/or vent port724 b, the vent component 726 a and/or vent component 726 b, and the PALresistance component 734 a and/or PAL resistance component 734 b, can beconfigured or designed to achieve a desired frequency response,including a desired low frequency corner of the frequency response, ofthe sensor device 702. In some embodiments, the sensor device 702,employing the vent port 724 a and/or vent port 724 b, the vent component726 a and/or vent component 726 b, and the PAL resistance component 734a and/or PAL resistance component 734 b, can be configured or designedto achieve the desired frequency response, including the desired lowfrequency corner of the frequency response, in conjunction with theknown acoustic resistance of the PAL resistance component 734 a and/orPAL resistance component 734 b (e.g., the acoustic resistance of thefilter component, membrane component, and/or hydrophobic coating).

FIG. 8 illustrates a cross-sectional diagram of another example system800 that can form an alternate (e.g., secondary) venting path in, atleast in part, a handle component of a sensor device, in a sensordevice, in accordance with various aspects and embodiments of thedisclosed subject matter. The system 800, by employing the alternateventing path formed in, at least in part, the handle component, canfacilitate providing desirable pressure equalization for the sensordevice while preventing or at least desirably inhibiting liquids orparticles from entering a back cavity of the sensor device and providingdesirable performance, including desirable frequency response, of thesensor device, in accordance with various aspects and embodiments of thedisclosed subject matter. The system 800 can be substantially the sameas the system 100 of FIG. 1 and system 700 of FIG. 7 , except that thesystem 800 can have a vent port formed in, in part, the handlecomponent, as well as in portions of other components of a stackstructure, of the sensor device to form an alternate venting path in thesensor device.

The system 800 can comprise a sensor device 802 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 802, such as more fully describedherein. The sensor device 802 can comprise a substrate component 804, asensor component 806, an acoustic port 808, a lid component 810, and aback cavity 812, wherein the sensor component 806 can comprise adiaphragm component 814 and a backplate component 816. The sensor device802 also can comprise a handle component, which can include a firstportion of the handle component 818 and a second portion of the handlecomponent 820. The sensor device 802 further can comprise a circuitcomponent 822. These respective components of the system 800 can be thesame as or similar to, and/or can comprise the same or similar featuresor functionalities as, respective components (e.g., respectively namedcomponents), such as more fully disclosed herein. These respectivecomponents of the system 800 can be arranged in relation to each otheras illustrated in FIG. 8 and as more fully described herein (e.g., withregard to system 100 of FIG. 1 or system 700 of FIG. 7 ).

In some embodiments, the sensor device 802 can include a vent port 824 aand/or vent port 824 b that can be formed in a desired portion of stackstructure 825 a, including a desired portion of the first portion of thehandle component 818, and/or a desired portion of stack structure 825 b,including a desired portion of the second portion of the handlecomponent 820. The stack structure 825 a and stack structure 825 b cancomprise various layers of materials, including, respectively, the firstportion of the handle component 818 and the second portion of the handlecomponent 820, respective ends of the diaphragm component 814, andrespective ends of the backplate component 816, wherein the respectiveends of the diaphragm component 814 can be portions of the diaphragmcomponent 814 that are not disposed over, facing, or exposed to theacoustic port 808. In certain embodiments, the disclosed subject matter(e.g., employing a processor and various tools or processes controlledby the processor) can utilize an etching process, lithography process,drilling process, or other desired process to etch away or otherwiseremove the portion of the respective materials of the stack structure825 a to form (e.g., create) the vent port 824 a and/or the portion ofthe respective materials of the stack structure 825 b to form vent port824 b. The disclosed subject matter can form the vent port 824 a and/orvent port 824 b to have desired dimensions (e.g., length, width). Thevent port 824 a and/or vent port 824 b can be formed in the respectiveportion(s) of the stack structure 825 a and/or the stack structure 825 bto create an opening(s) or path(s) (e.g., a secondary or alternate ventpath(s)) between the back cavity 812 and the outside of the sensordevice 802 to enable desirable equalization or control of pressure(e.g., pressure equalization) on either side of the diaphragm component814, as more fully described herein.

For reasons of brevity and clarity, the system 800 does not explicitlyreference a vent component(s), including a set(s) of vents and a venthandle component(s), and a PAL resistance component(s). However, in someembodiments, the sensor device 802 can comprise one or more ventcomponents, each including a set of vents and a vent handle component,and one or more PAL resistance components, that can be respectivelyassociated with the vent port 824 a and/or vent port 824 b in a same orsimilar manner as more fully described herein (e.g., with regard to thesensor device 702 of FIG. 7 ).

FIG. 9 depicts a cross-sectional diagram of an example system 900 thatcan employ an alternate (e.g., secondary) venting path, formed via avent port with an integrated vent component, in a sensor device,containing no back plate component or comprising one or more backplatecomponents, to facilitate providing desirable pressure equalization forthe sensor device while preventing or at least desirably inhibitingliquids or particles from entering a back cavity of the sensor deviceand providing desirable performance, including desirable frequencyresponse, of the sensor device, in accordance with various aspects andembodiments of the disclosed subject matter. The system 900 can besubstantially the same as the system 100 of FIG. 1 , except that thesystem 900 optionally can comprise no backplate component, or cancomprise one or more (e.g., two) backplate components.

The system 900 can comprise a sensor device 902 that can be or cancomprise a sensor assembly or sensor package that can comprise variouscomponents of the sensor device 902, such as described herein. Thesensor device 902 can comprise a substrate component 904 (e.g.,substrate), a sensor component 906, an acoustic port 908, a lidcomponent 910, and a back cavity 912. In accordance with variousembodiments, the sensor component 906 can comprise a diaphragm component914 and optionally can contain no backplate component or can include oneor more backplate components, such as backplate component 916 a and/orbackplate component 916 b. If employed in the sensor device 902, thebackplate component 916 a can be located within the back cavity 912 inproximity to (e.g., within a desired defined distance of) the diaphragmcomponent 914. If employed in the sensor device 902, the backplatecomponent 916 b can be located on the acoustic port side of thediaphragm component 914 in proximity to the diaphragm component 914 andbetween the opening of the acoustic port 908 and the diaphragm component914. Whether the sensor component 906 contains no backplate component,comprises one backplate component (e.g., backplate component 916 a orbackplate component 916 b), or comprises more than one backplatecomponent (e.g., backplate component 916 a and backplate component 916b) can depend on the type of sensor desired, the sensor characteristicsdesired for the sensor device, and/or other factors relating to thedesign of the sensor device.

The sensor device 902 also can comprise a handle component, which caninclude a first portion of the handle component 918 and a second portionof the handle component 920. The sensor device 902 further can comprisea circuit component 922 and a vent port 924. The sensor device 902 alsocan include a vent component 926, which can comprise a set of vents 928and a vent handle component that can include a first portion of the venthandle component 930 and a second portion of the vent handle component932 on which respective ends of the set of vents 928 can be placed(e.g., directly or indirectly placed) to suspend or dispose the set ofvents 928 over the vent port 924. The sensor device 902 further cancomprise a PAL resistance component 934 that can be placed (e.g.,inserted) in or integrated with the vent port 924.

These respective components of the system 900 can be the same as orsimilar to, and/or can comprise the same or similar features orfunctionalities as, respective components (e.g., respectively namedcomponents), such as more fully disclosed herein. These respectivecomponents of the system 900 can be arranged in relation to each otheras depicted in FIG. 9 and as more fully described herein (e.g., withregard to system 100 of FIG. 1 ).

In some embodiments, the sensor device 902 can comprise (e.g.,optionally can comprise) a port cover component 936 that can beassociated with (e.g., attached or adhered to, or integrated with) thesubstrate component 904 to cover the acoustic port 908 and protect thediaphragm component 914 from objects (e.g., particles) that may try toenter the acoustic port 908. The port cover component 936 can, forexample, comprise a mesh structure with holes of desired (e.g., suitableor optimal) size and shape that can allow acoustic signals or waves topass through the port cover component 936 to enter the acoustic port 908and interact with the diaphragm component 914 without undesired (e.g.,unacceptable) degradation or disruption of the acoustic signals or wavesas they enter the acoustic port and/or without undesired (e.g.,unacceptable) degradation or disruption of the performance of thediaphragm component 914 and the sensor device 902 overall. The disclosedsubject matter can drill holes in the port cover component 936 orotherwise can remove material from the port cover component 936 to formthe holes in the port cover component 936. The port cover component 936can be formed using a one or more desired materials, which can comprisea conductive material and/or a non-conductive material.

In some embodiments, additionally or alternatively, if the vent port 924is sufficiently designed (e.g., using a desired combination of a filter(e.g., PIF), MEMS vent structure, and/or coating (e.g., hydrophobiccoating)), as desired, the port cover component 936 can be or cancomprise a relatively low resistance filter (e.g., a very low resistancePIF) that can be placed over the acoustic port 908 for the purpose ofpreventing larger particles from entering the acoustic port 908 andcontacting the diaphragm component 914, wherein such relatively lowresistance filter will not substantially reduce (e.g., degrade) theperformance of the sensor device 902.

In accordance with various embodiments of the disclosed subject matter,components (e.g., substrate component, sensor component, circuitcomponent, vent component, PAL resistance component, handle component,and/or other component) of a system can be situated or implemented on asingle integrated circuit (IC) die or chip. An IC chip can be acomplementary metal-oxide-semiconductor (CMOS) chip, for example. Inaccordance with various other embodiments, the components of the systemcan be implemented on an ASIC chip. In accordance with still otherembodiments, the components of the system can be situated or implementedon multiple IC dies or chips. For example, the vent component and/orvent port (e.g., alternate or secondary vent port) can be implemented onthe same die or chip as the sensor component or can be implemented onanother die or chip than the die or chip on which the sensor componentis implemented.

It is to be appreciated and understood that, in accordance with variousaspects and embodiments of the disclosed subject matter, respectivefeatures described herein with regard to a particular drawing of thedisclosed subject matter can be implemented with other respectivefeatures, or as an alternative to other respective features, describedherein with regard to another particular drawing of the disclosedsubject matter. As a non-limiting example, the disclosed subject mattercan implement the integrated vent component, e.g., vent component 426integrated with the vent port 424 of the system 400 of FIG. 4 , in otherembodiments of a sensor device, wherein, e.g., an integrated ventcomponent can be integrated with a vent port (e.g., vent port 524) thatcan be formed in another component (e.g., lid component 510) of a sensordevice. As another non-limiting example, as desired, the disclosedsubject matter can implement first vent features (e.g., vent port 124formed in substrate component 104, vent component 126, and/or PALresistance component 134) along with second vent features (e.g., ventport 524 formed in lid component 510, vent component 526, and/or PALresistance component 534) (and/or other vent features) in a sensordevice.

The aforementioned devices and/or systems have been described withrespect to interaction between several components. It should beappreciated that such systems and components can include thosecomponents or sub-components specified therein, some of the specifiedcomponents or sub-components, and/or additional components.Sub-components could also be implemented as components coupled to and/orcommunicatively coupled to other components rather than included withinparent components. Further yet, one or more components and/orsub-components may be combined into a single component providingaggregate functionality. The components may also interact with one ormore other components not specifically described herein for the sake ofbrevity, but known by those of skill in the art.

FIGS. 10-11 illustrate methods and/or flow diagrams in accordance withthe disclosed subject matter. For simplicity of explanation, the methodsare depicted and described as a series of acts. It is to be understoodand appreciated that the subject disclosure is not limited by the actsillustrated and/or by the order of acts, for example acts can occur invarious orders and/or concurrently, and with other acts not presentedand described herein. Furthermore, not all illustrated acts may berequired to implement the methods in accordance with the disclosedsubject matter.

Referring to FIG. 10 , illustrated is a flow diagram of an examplemethod 1000 that can form an alternate (e.g., secondary) vent path in asensor device to facilitate providing desirable pressure equalizationfor the sensor device while preventing or at least desirably inhibitingliquids or particles from entering a back cavity of the sensor deviceand providing desirable performance, including desirable frequencyresponse, of the sensor device, in accordance with various aspects andembodiments of the disclosed subject matter. The method 1000 can beimplemented, for example, by a system or device comprising a sensorcomponent, and/or a processor and associated memory (e.g., data store),wherein the processor can control or facilitate controlling formation orfabrication of the sensor device, including the alternate venting path.

At 1002, an acoustic port can be formed in a first portion of asubstrate component of a sensor device. The disclosed subject matter(e.g., employing a processor and associated memory) can form theacoustic port in the first portion of the substrate component of thesensor device.

At 1004, a vent port can be formed in a second portion of the sensordevice other than the diaphragm component of the sensor device. Thedisclosed subject matter (e.g., employing a processor and associatedmemory) can form the vent port in the second portion of the sensordevice other than the diaphragm component. For example, the disclosedsubject matter can form one or more vent ports, comprising the ventport, in one or more of the substrate component, a lid component, acircuit component (e.g., ASIC), or a handle component of the sensordevice, as more fully described herein.

At 1006, a back cavity can be formed in the sensor device, wherein theback cavity can be partially formed and defined by the substratecomponent, the sensor component, comprising the diaphragm component, andthe vent component. The disclosed subject matter (e.g., employing aprocessor and associated memory) can form the back cavity, wherein theback cavity can be formed or defined by the substrate component, thesensor component, the lid component the circuit component, the handlecomponent, and/or another component of the sensor device, as more fullydescribed herein. The vent port can provide a venting path that canfacilitate equalization of pressure associated with the diaphragmcomponent, as more fully described herein.

In some embodiments, the method 1000 can proceed to reference point A.In certain embodiments, method 1100 of FIG. 11 can proceed fromreference point A to form or insert a PAL resistance component in thevent port formed in the second portion of the sensor device other thanthe diaphragm component and/or form a vent component that can bedisposed over, integrated with, or otherwise associated with the ventport.

Turning to FIG. 11 , depicted is a flow diagram of an example method1100 that can form or implement a PAL resistance component and a ventcomponent that can be associated with an alternate (e.g., secondary)vent path of a sensor device to facilitate providing desirable pressureequalization for the sensor device while preventing or at leastdesirably inhibiting liquids or particles from entering a back cavity ofthe sensor device and providing desirable performance, includingdesirable frequency response, of the sensor device, in accordance withvarious aspects and embodiments of the disclosed subject matter. Themethod 1100 can be implemented, for example, by a system or devicecomprising a sensor component, and/or a processor and associated memory(e.g., data store), wherein the processor can control or facilitatecontrolling formation or fabrication of the sensor device, including thealternate venting path, a PAL resistance component, and a ventcomponent. In some embodiments, the method 1100 can proceed fromreference point A of the method 1100 of FIG. 11 .

At 1102, a PAL resistance component can be created or inserted in or on,or associated with, the vent port. The disclosed subject matter (e.g.,employing a processor and associated memory) can create the PALresistance component in or on, insert the PAL resistance component in,or otherwise associated the PAL resistance component with the vent port.The PAL resistance component can comprise, for example, a membranecomponent (e.g., a porous membrane) and/or a filter component that caninhibit, resist, or impede liquids or particles (e.g., liquids orparticles outside the sensor device) from entering the back cavity ofthe sensor device via the vent port, as more fully described herein.

At 1104, a vent component, comprising a set of vents, can be associatedwith the vent port. The disclosed subject matter (e.g., employing aprocessor and associated memory) can associate the vent component withthe vent port to facilitate providing a desirable venting of air via thealternate vent path (e.g., via the vent port) and facilitate desirablepressure equalization with respect to both sides of the diaphragmcomponent (e.g., the back cavity side and the acoustic port side of thediaphragm component). In some embodiments, the disclosed subject mattercan create the vent component to be located inside the sensor packageand disposed over the vent port such that air traveling between the ventport and back cavity can pass through the vents of the vent component.In other embodiments, the disclosed subject matter can create the ventcomponent to be integrated with the vent port, wherein air travelingbetween the vent port and back cavity can pass through the vents of thevent component. As desired, in certain embodiments, the disclosedsubject matter can treat or process the vent component, including theset of vents, and/or the PAL resistance component (e.g., the membranecomponent, if it is used) with a desired liquid-resistant and/orparticle resistant coating that can inhibit or prevent, or at leasteffectively prevent, liquid and particles from entering the back cavityvia the vent port. The desired liquid-resistant and/or particleresistant coating can be or can comprise a hydrophobic orsuperhydrophobic coating, for example.

It is to be appreciated and understood that components (e.g., sensorcomponent, diaphragm component, backplate component, substratecomponent, lid component, handle component, vent handle component,circuit component, PAL resistance component, vent component, acousticport, and/or vent port, . . . ), as described with regard to aparticular device, system, or method, can comprise the same or similarfunctionality as respective components (e.g., respectively namedcomponents or similarly named components) as described with regard toother devices, systems, or methods disclosed herein.

Although the description has been provided with respect to particularembodiments thereof, these particular embodiments are merelyillustrative and not restrictive.

While particular embodiments have been described herein, latitudes ofmodification, various changes, and substitutions are intended in theforegoing disclosures, and it will be appreciated that in some instancessome features of particular embodiments will be employed without acorresponding use of other features without departing from the scope andspirit as set forth. Therefore, many modifications may be made to adapta particular situation or material to the essential scope and spirit.

As used herein, the terms “example” and/or “exemplary” are utilized tomean serving as an example, instance, or illustration. For the avoidanceof doubt, the subject matter disclosed herein is not limited by suchexamples. In addition, any aspect or design described herein as an“example” and/or “exemplary” is not necessarily to be construed aspreferred or advantageous over other aspects or designs, nor is it meantto preclude equivalent exemplary structures and techniques known tothose of ordinary skill in the art.

As used in this application, the terms “component,” “system,”“interface,” and the like, can refer to and/or can include acomputer-related entity or an entity related to an operational machinewith one or more specific functionalities. The entities disclosed hereincan be either hardware, a combination of hardware and software,software, or software in execution. For example, a component may be, butis not limited to being, a process running on a processor, a processor,an object, an executable, a thread of execution, a program, and/or acomputer. By way of illustration, both an application running on aserver and the server can be a component. One or more components mayreside within a process and/or thread of execution and a component maybe localized on one computer and/or distributed between two or morecomputers.

In another example, respective components can execute from variouscomputer readable media having various data structures stored thereon.The components may communicate via local and/or remote processes such asin accordance with a signal having one or more data packets (e.g., datafrom one component interacting with another component in a local system,distributed system, and/or across a network such as the Internet withother systems via the signal). As another example, a component can be anapparatus with specific functionality provided by mechanical partsoperated by electric or electronic circuitry, which is operated by asoftware or firmware application executed by a processor. In such acase, the processor can be internal or external to the apparatus and canexecute at least a part of the software or firmware application. As yetanother example, a component can be an apparatus that provides specificfunctionality through electronic components without mechanical parts,wherein the electronic components can include a processor or other meansto execute software or firmware that confers at least in part thefunctionality of the electronic components. In an aspect, a componentcan emulate an electronic component via a virtual machine, e.g., withina cloud computing system.

What has been described above includes examples of aspects of thedisclosed subject matter. It is, of course, not possible to describeevery conceivable combination of components or methods for purposes ofdescribing the disclosed subject matter, but one of ordinary skill inthe art may recognize that many further combinations and permutations ofthe disclosed subject matter are possible. Accordingly, the disclosedsubject matter is intended to embrace all such alterations,modifications and variations that fall within the spirit and scope ofthe appended claims. Furthermore, to the extent that the terms“includes,” “has,” or “having,” or variations thereof, are used ineither the detailed description or the claims, such terms are intendedto be inclusive in a manner similar to the term “comprising” as“comprising” is interpreted when employed as a transitional word in aclaim.

What is claimed is:
 1. A system, comprising: a sensor assembly componentcomprising: a substrate component, wherein an acoustic port is formed ina first portion of the substrate component; a sensor componentcomprising a diaphragm component disposed over the acoustic port; ahandle component disposed between the diaphragm component and thesubstrate component; and a vent component that is associated with a ventport formed in a second portion of the sensor assembly component otherthan the diaphragm component, wherein the sensor assembly componentcomprises a back cavity that is partially formed and defined by thesubstrate component, the sensor component, the handle component, and thevent component, wherein the vent port provides a vent path to the backcavity, wherein characteristics of the vent component define adirectional response of the sensor component, and wherein thecharacteristics comprise an acoustic resistance level of the ventcomponent and a location of the vent port and the vent component inrelation to the diaphragm component.
 2. The system of claim 1, whereinthe vent path is an only vent path to the back cavity, and wherein thevent path facilitates pressure equalization between the back cavity andan external environment that is external to the sensor assemblycomponent.
 3. The system of claim 1, wherein the diaphragm component isbetween and adjacent to the back cavity and the acoustic port, andwherein a first side of the diaphragm component faces and partiallydefines the back cavity and a second side of the diaphragm component isopposite to the first side and faces the acoustic port.
 4. The system ofclaim 1, wherein the sensor component is at least one of aMicroelectromechanical Systems (MEMS) sensor, an acoustic sensor, adirectional sensor, a cardioid sensor, a capacitive sensor, or a piezosensor.
 5. The system of claim 1, wherein, to facilitate attaining thedirectional response of the sensor component, the directional response,a sensing pattern, or a directional pickup pattern of the sensorcomponent is controlled, determined, or defined based on the acousticresistance level of the vent component and the location of the vent portand the vent component in relation to the diaphragm component, thelocation being in the second portion of the sensor assembly componentother than the diaphragm component.
 6. The system of claim 5, whereinthe vent port is a first vent port, wherein the location is a firstlocation, wherein at least one of a second vent port or a housingcomponent is located in the second portion of the sensor assemblycomponent other than the diaphragm component, and wherein, to facilitatethe controlling, the determining, the defining, or attaining of thedirectional response, the sensing pattern, or the directional pickuppattern of the sensor component, an amount of acoustic delay in thesensor component is controlled, determined, or defined based on a firstdistance between the first vent port and the diaphragm component, asecond distance between a second vent port and the diaphragm component,or a second location of the housing component in relation to thediaphragm component, the first vent port, or the second vent port. 7.The system of claim 1, wherein the sensor component has a gradientresponse frequency corner or a pressure gradient response of a frequencyresponse that is controlled, determined, or defined based on thecharacteristics comprising a number and a size of vents of the ventcomponent, whether vent features of the vent component are implementedusing a Microelectromechanical Systems (MEMS) structure, the acousticresistance level of the vent component, an amount of distance betweenthe vent port and the diaphragm component, or the location of the ventport and the vent component in relation to the diaphragm component, thelocation being in the second portion of the sensor assembly componentother than the diaphragm component.
 8. The system of claim 1, whereinthe sensor assembly component further comprises a particle-and-liquidresistance component that comprises a porous membrane component or afilter component that is associated with the vent port and inhibits atleast one of the liquid or the particle from entering the back cavityvia the vent port.
 9. The system of claim 8, wherein the vent componentor the porous membrane component is treated with a hydrophobic coatingor a superhydrophobic coating to facilitate inhibiting at least one ofthe liquid or the particle from entering the back cavity via the ventport.
 10. The system of claim 1, wherein the vent component comprises aMicroelectromechanical Systems (MEMS) device, wherein the ventcomponent, comprising the MEMS device, is in the location that is in thesecond portion of the sensor assembly component other than the diaphragmcomponent and the acoustic port, and wherein the vent path provided bythe vent port associated with the vent component is an only vent path tothe back cavity.
 11. The system of claim 1, wherein the vent componentis disposed over the vent port, integrated with the vent port, orintegrated with the acoustic port.
 12. The system of claim 1, whereinthe vent component comprises a vent handle component and a set of vents,comprising at least two vents, and wherein respective ends of the atleast two vents are associated with respective portions of the venthandle component to suspend or dispose the at least two vents over thevent port.
 13. The system of claim 1, wherein the sensor assemblycomponent further comprises: a lid component that is associated with thesubstrate component; and a circuit component that is associated with thesensor component, wherein the lid component, the substrate component,the vent component, the diaphragm component, the circuit component, andthe handle component are arranged in relation to each other to form ordefine the back cavity.
 14. The system of claim 13, wherein one or morevent ports, comprising the vent port, are formed in at least one of thesubstrate component, the lid component, the circuit component, or thehandle component.
 15. A device, comprising: a substrate component,wherein an acoustic port is formed in a first portion of the substratecomponent; a sensor component comprising: a diaphragm component disposedover the acoustic port, and one or more backplate components disposedover the acoustic port; a handle component disposed between thediaphragm component and the substrate component; and a vent componentthat is associated with a vent port formed in a second portion of thedevice other than the diaphragm component and the one or more backplatecomponents, wherein the device comprises a back cavity that is partiallyformed and defined by the substrate component, the sensor component, thehandle component, and the vent component, wherein the vent port providesa vent path that facilitates an equalization of pressure associated withthe diaphragm component, wherein the vent path is an only vent path tothe back cavity, wherein the diaphragm component spans from a firsthandle portion of the handle component across the acoustic port to asecond handle portion of the handle component, wherein the diaphragmcomponent is configured to contain no hole, wherein the sensor componenthas a sensing directionality that is based on characteristics of thevent component and the vent port, wherein the sensing directionalitysatisfies a defined frequency response criterion, and wherein thecharacteristics comprise an amount of acoustic resistance of the ventport or the vent component, and a location of the vent port and the ventcomponent in relation to the diaphragm component.
 16. The device ofclaim 15, wherein the sensor component is at least one of aMicroelectromechanical Systems (MEMS) sensor, an acoustic sensor, adirectional sensor, a cardioid sensor, an audio sensor, a capacitivesensor, or a piezo sensor.
 17. The device of claim 15, wherein thesensor component has a gradient response frequency corner or a pressuregradient response of a frequency response that is managed, determined,or defined based on the characteristics comprising the amount of theacoustic resistance of the vent port or the vent component, a number anda size of vents of the vent component, whether vent features of the ventcomponent are implemented using a Microelectromechanical Systems (MEMS)structure, a distance between the vent port and the diaphragm component,or the location of the vent port and the vent component in relation tothe diaphragm component, the location being in the second portion of thedevice other than the diaphragm component and the one or more backplatecomponents.
 18. The device of claim 15, further comprising aparticle-and-liquid resistance component that comprises at least one ofa membrane component or a filter component that is associated with thevent port, and wherein at least one of the membrane component or thefilter component impedes at least one of a liquid or a particle fromentering the back cavity via the vent port.
 19. The device of claim 15,wherein the vent component is disposed over or integrated with the ventport.
 20. The device of claim 15, wherein the diaphragm component, byspanning from the first handle portion of the handle component acrossthe acoustic port to the second handle portion of the handle componentand by containing no hole, prevents at least one of a liquid or aparticle from entering the back cavity via the acoustic port and thediaphragm component.
 21. The device of claim 15, further comprising: alid component that is associated with the substrate component; andcircuitry that is associated with the sensor component and processes asignal received from the sensor component, wherein the sensor componentgenerates the signal based at least in part on a movement of thediaphragm component in relation to the one or more backplate componentsin response to an input signal received via the acoustic port, andwherein the lid component, the substrate component, the vent component,the diaphragm component, the circuitry, and the handle component, arearranged in relation to each other to form or define the back cavity.22. The device of claim 21, wherein the vent port is formed in thesubstrate component, the lid component, the circuitry, or the handlecomponent.
 23. A device, comprising: a substrate component, wherein anacoustic port is formed in a first portion of the substrate component; asensor component comprising a diaphragm component disposed over theacoustic port; a handle component disposed between the diaphragmcomponent and the substrate component, wherein the diaphragm componentspans from a first handle portion of the handle component across theacoustic port to a second handle portion of the handle component, andwherein the diaphragm component is configured to contain no hole; and avent component that is associated with a vent port formed in a secondportion of the device other than the diaphragm component, wherein thedevice comprises a back cavity that is partially formed and defined bythe substrate component, the sensor component, and the vent component,wherein the vent port provides a vent path that facilitates anequalization of pressure associated with the diaphragm component,wherein the vent component comprises a Microelectromechanical Systems(MEMS) structure that is integrated with the vent port and associatedwith the vent path, wherein the vent path is an only vent path to theback cavity, wherein the sensor component has a sensing directionalitythat is based on a group of characteristics of the vent component andthe vent port, and wherein the group of characteristics comprise theMEMS structure that is integrated with the vent port.
 24. The device ofclaim 23, wherein the sensor component comprises at least one of a MEMSsensor, an acoustic sensor, a directional sensor, a cardioid sensor, acapacitive sensor, or a piezo sensor.
 25. The device of claim 23,wherein the sensor component has a gradient response frequency corner ora pressure gradient response of a frequency response that is controlled,determined, or defined based on the group of characteristics comprisingthe MEMS structure of the vent component, a number and a size of ventsof the vent component, an amount of an acoustic resistance of the ventport or the vent component, a distance between the vent port and thediaphragm component, or a location of the vent port and the ventcomponent in relation to the diaphragm component, the location being inthe second portion of the device other than the diaphragm component.